Pre-Vacuum Atmosphere Furnace

High Temperature Pre-Vacuum Atmosphere Controlled Furnace up to 1700°C

This furnace is pre-vacuumed to ensure that the oxygen content in the furnace is minimized, and then nitrogen, argon or nitrogen-hydrogen is introduced to obtain the desired heating treatment under the protection of the atmosphere. Due to its excellent atmosphere and compactness, it has been widely used in material laboratories or small batch production of semiconductors, silicon nitride, and other products

  • Max temperature:
    1200℃ (HRE Fe-Cr-Al-Mo wire)
    1400℃ (SiC Heater)
    1700℃ (MoSi2 Heater)
  • The furnace is made of alumina polycrystalline fiber, and the temperature field is balanced and pollution-free.
  • Fully enclosed structural furnace, double-layer thickened steel plate, can bear 0.1 Mpa pressure
  • The top, left, right, and back are made of 12mm solid square steel for reinforcement, and the vacuum is not deformed. The maximum vacuum can be up to -0.08MPa.
  • Temperature controlling system adopts industrial precision 0.2-level intelligent instrument, PID adjustment, 50-segment programming
  • The furnace door has good sealing performance. Four hand wheels lock the furnace door and use the silicone ring to seal.

Standard spares:

  • Furnace door fire brick (except 1200 type)
  • High temperature gloves; tongs; manual
  • Two pcs heating elements (except 1200 type)
  • Rotary vane vacuum pump

Additional spares:

  • Direct-connected vacuum pump
  • Touch screen/computer connection software
  • Crucible (multi-layer kiln furniture)
  • Heating element (Sic and MoSi2)
  • Air system (float/proton flow meter, 2 / 3 channels of gas)

 

Ⅰ. Technical Specifications
Max. temperature1700℃ (<2hour)
Working temperature1600℃
Standard Temperature controlling●  PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.
●  51 programmable segments for precise control of heating rate, cooling rate and dwell time.
●  Built in PID Auto-Tune function with overheating & broken Thermocouple broken protection.
●  Over temperature protection and alarm allows for operation without attendant
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Optional of Temperature controlling●  Software (Furnace can be operated by PC by installing a control software)
●  Touch screen temperature controller
Temperature accuracy±1℃
Temperature Uniformity±5℃ over 120mm @ 1600℃
±3℃ over 80mm @ 1600℃
Heating rate0-15℃ /min
ThermocoupleB type (Pt-Rh) with 99.7% purity Alumina tube
Heating elementU type MoSi2 heating element
Furnace ChamberThree layers of ceramic fiber insulation materials
●  First layer: 1800℃ ceramic fiber board.
●  Second layer: 1600℃ ceramic fiber board.
●  Third layer: 1430℃ ceramic fiber board.
Furnace structureDouble layer steel casing with dual cooling fan, surface temperature below 60℃
Furnace door●  Power cutting off when furnace door open
Warranty●  One year limited warranty with life time support. (Consumable parts such as heating elements and crucibles are not covered by the warranty, please order the replacement at related products)
●  ATTENTION: Any damages caused by the use of corrosive and acidic gases are not under the coverage of One Year Limited Warranty.
CertificationsCE
Ⅱ. Application Notes
Using Attentions●  Cooling rate shall also not exceed 10℃/min.
●  Toxic or explosive gases are not recommended for use with this furnace without necessary safety controls and supervision.
●  Small cracks may appear on the surface of the refractory ceramics over extended use. This is a normal occurrence and the cracks may be repaired with alumina coating.
●  Refractory door block must be inserted before closing door.

 

ModelMax. Temp.Chamber sizeVoltagePower
BR-12AN-11200℃100*100*100mm220V0.8kW
BR-12AN-21200℃120*120*130mm220V1.2kW
BR-12AN-31200℃150*150*150mm220V2.5kW
BR-12AN-51200℃150*150*200mm220V3kW
BR-12AN-81200℃200*200*200mm220V5kW
BR-12AN-121200℃200*200*300mm220V6kW
BR-12AN-271200℃300*300*300mm380V8kW
BR-12AN-361200℃300*300*400mm380V10kW
BR-12AN-641200℃400*400*400mm380V16kW

 

ModelMax. Temp.Chamber sizeVoltagePower
BR-14AS-11400℃100*100*100mm220V1kW
BR-14AS-21400℃120*120*130mm220V2kW
BR-14AS-31400℃150*150*150mm220V3kW
BR-14AS-51400℃150*150*200mm220V4kW
BR-14AS-81400℃200*200*200mm220V5kW
BR-14AS-121400℃200*200*300mm220V7kW
BR-14AS-271400℃300*300*300mm380V9kW
BR-14AS-361400℃300*300*400mm380V11kW
BR-14AS-641400℃400*400*400mm380V18kW

 

ModelMax. Temp.Chamber sizeVoltagePower
BR-17AM-11700℃100*100*100mm220V1kW
BR-17AM-21700℃120*120*130mm220V3kW
BR-17AM-31700℃150*150*150mm220V4kW
BR-17AM-51700℃150*150*200mm220V5kW
BR-17AM-81700℃200*200*200mm220V7kW
BR-17AM-121700℃200*200*300mm220V8kW
BR-17AM-271700℃300*300*300mm380V10kW
BR-17AM-361700℃300*300*400mm380V12kW
BR-17AM-641700℃400*400*400mm380V20kW