CVD Furnace

CVD tube furnace

Brother’s High Temperature Vacuum Lab CVD Furnace, 1200℃ 1400℃ 1600℃ CVD Tube Furnace Testing Machine, working temperature from 300℃ to 1600℃. With a vacuum pump, gas mixing, our CVD tube furnace adopts an advanced temperature control system, high temperature accuracy, excellent gas flow accuracy, easy operation, excellent heat-insulation effect, symmetrical temperature uniformity. Mainly used for labs of the university, research center, and production enterprise, etc.

CVD tube furnace

Furnace Features:

  • Max temperature:
    1200℃ (HRE Fe-Cr-Al-Mo wire)
    1400℃ (SiC Heater)
    1600℃ (MoSi2 Heater)
  • 50 segments programmable and auto control
  • Furnace structure: double layer steel dual cooling fan, the surface temperature below 50℃
  • 304 stainless steel sealing flange
  • Adjustable flange support structure at both ends to extend furnace tube life
  • Over-temperature protection function, automatic power-off when the temperature exceeds the allowable set value
  • Safety protection Automatically power off when the furnace body leaks
  • Heating rate ≦20℃/min
  • Temperature accuracy ±1 ℃
  • Max vacuum -0.1MPa
  • Configuration molecular pump, Vacuum 7×10^(-4)Pa

Multi-channel gas mixing tank & flowmeter

cvd furnace gas mixing

cvd furnace gas mixing tank

cvd furnace flowmeter

CVD Furnace Specification:

MAX TEMPERATURE: 1200℃ / 1400℃ / 1600℃ NORMAL VACUUM: -0.1MPa
MAX VACUUM: Configuration Molecular Pump, Vacuum 7×10-4 Pa (Optional) FLANGE: 304 Stainless Steel Sealing Flange
OVER-TEMPERATURE PROTECTION: Automatic Power-off When The Temperature Exceeds The Allowable Set Value SAFETY PROTECTION: Automatically Power Off When The Furnace Body Leaks
FURNACE STRUCTURE: Double Layer Steel Dual Cooling Fan, Surface Temperature Below 50℃ MAX HEATING RATE: 20°C /min
TEMPERATURE ACCURACY: ±1℃ TEMPERATURE UNIFORMITY: ±5℃
TEMPERATURE CONTROL: 50 Segments Programmable And Auto Control APPLICATION: CVD Testing

 

Standard Spares:

  • Plugging tube 4 pcs
  • Furnace tube 1 pc
  • Vacuum pump 1 pc
  • Vacuum sealing flange 2 sets
  • Vacuum gauge 1 pc
  • Gas mixing tank
  • Flowmeter

Optional Spares:

  • High Vacuum system (Rotary vane vacuum pump, Diffusion pump, Molecular pump)
  • Quick release flange, Three-way flange
  • 7 inch HD touch screen

High Temperature Vacuum Lab CVD Tube Furnace Standard model:

Lab CVD Furnace up to 1200℃

Model Dia*Heating zone Power Max working temperature Thermo
couple
Furnace tube material Heating elements
BR-12NT-40/300 40x300mm 3 KW 1200℃ K type Quartz tube Fe-Cr-Al-Mo wire
BR-12NT-60/300 60x300mm 3 KW
BR-12NT-80/300 80x300mm 5 KW
BR-12NT-100/300 100x300mm 5 KW
BR-12NT-120/300 120x300mm 6 KW
BR-12NT-40/450 40x450mm 3 KW
BR-12NT-60/450 60x450mm 3 KW
BR-12NT-80/450 80x450mm 5 KW
BR-12NT-100/450 100x450mm 5 KW
BR-12NT-120/450 120x450mm 6 KW

 

 

Lab CVD Furnace up to 1400℃

Model Dia*Heating zone Power Max working temperature Thermo
couple
Furnace tube material Heating elements
BR-14ST-40/300 40x300mm 4 KW 1400℃ S type Alumina tube Sic Heater
BR-14ST-60/300 60x300mm 4 KW
BR-14ST-80/300 80x300mm 4 KW
BR-14ST-100/300 100x300mm 6 KW
BR-14ST-120/300 120x300mm 6 KW
BR-14ST-40/450 40x450mm 4 KW
BR-14ST-60/450 60x450mm 4 KW
BR-14ST-80/450 80x450mm 4 KW
BR-14ST-100/450 100x450mm 6 KW
BR-14ST-120/450 120x450mm 6 KW

 

Lab CVD Furnace up to 1600℃

Model Dia* Heating

zone

Power Max working temperature Thermo
couple
Furnace tube material Heating elements
BR-16MT-40/300 40x300mm 4 KW 1600℃ B type Alumina tube MoSi2 Heater
BR-16MT-60/300 60x300mm 4 KW
BR-16MT-80/300 80x300mm 4 KW
BR-16MT-100/300 100x300mm 6 KW
BR-16MT-120/300 120x300mm 6 KW
BR-16MT-40/450 40x450mm 5 KW
BR-16MT-60/450 60x450mm 5 KW
BR-16MT-80/450 80x450mm 5 KW
BR-16MT-100/450 100x450mm 7 KW
BR-16MT-120/450 120x450mm 7 KW

 

See our other type of tube furnace:

 

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