PECVD Furnace

1200C Max. Lab PECVD Furnace with Gas Delivery & Vacuum Pump

Intelligent PECVD Introduction:

PECVD system is designed to decrease the reaction temperature of traditional CVD. It installed RF induction equipment in front of traditional CVD to ionize reacting gas, so the plasma is generated. Plasma’s high activity is Reaction is accelerated due to the high activity of plasma. So, this system is called PECVD.

This model is the newest product, it synthesized the advantages of most PECVD furnace systems, and added a pre-heating zone in the front of the PECVD furnace system. Tests showed that the deposition speed is quicker, the film quality is better, holes are less, and won’t crack. AISO fully automatic intelligent control system is independently designed by our company, it is more convenient to operate and its function is more powerful.

Wide application range of PECVD furnace: metal film, ceramic film, composite film, the continuous growth of various films. Easy to increase function, can expand plasma cleaning etch and other functions.

 

PECVD Furnace Features:

  • High film deposition rate: RF glow technology, greatly increasing the deposition rate of the film, the deposition rate can reach 10Å / S
  • High area uniformity: Advanced multi-point RF feeding technology, special gas path distribution, and heating technology, etc., make the film uniformity index reach 8%
  • High consistency: using the advanced design concept of the semiconductor industry, the deviation between the substrates of one deposition is less than 2%
  • High process stability: Highly stable equipment ensures a continuous and stable process.

 

PECVD Furnace Standard Spares:

  • Plugging tube 4 pcs
  • Furnace tube 1 pc
  • Vacuum pump 1 pc
  • Vacuum sealing flange 2 sets
  • Vacuum gauge 1 pc
  • Gas delivery & vacuum pump
  • RF plasma equipment

PECVD Furnace Optional Spares:

  • Quick release flange, Three-way flange
  • 7 inch HD touch scree

pecvd furnace -1

1200℃ PECVD Tube Furnace Standard specification:

1. Heating System

Max.temperature1200℃ (1 hour)
Working temperature≤1100℃
Chamber sizeΦ100*1650mm (Tube diamater is customizable)
Chamber materialHigh purity alumina fiber board
ThermocoupleK type
Temperatureaccuracy±1℃
PECVD furnace

Temperature control

● 50 programmable segments for precise control of heating rate, cooling rate and dwell time.

● Built in PID Auto-Tune function with overheating & broken thermocouple broken protection.

● PLC automatic control system by PC controller inside.

● The temperature control system, sliding system (Time and Distance) could be controlled by program.

Heating length440mm
Constant heating length200mm
Heating elementResistance wire
Power supplySingle phase, 220V, 50Hz
Rated power9kW

2. RF Plasma Source

RF frequency13.56 MHz±0.005%
Output power500W
Max reflect power500W
RF output interface50 Ω, N-type, female
Power stability±0.1%
Harmonic component≤-50dbc
Supply voltage/FrequencySingle phase AC220V 50/60HZ
Whole efficiency>=70%
Power factor>=90%
Cooling methodForced air

3. Three precision mass flowmeters control system of PECVD furnace

External dimension600x600x650mm
Connector typeSwagelok SS joint
Standard range (N2)0~100sccm, 0~200sccm, or customizable
Accuracy±1.5%
Linear±0.5~1.5%
Repeatability±0.2%
Response timeGas property: 1~4 Sec;
Electrical property: 10 Sec
Pressure range0.1~0.5 MPa
Max.pressure3MPa
InterfaceΦ6,1/4”
Display4 digit display
Ambient temperature5~45 high purity gas
Pressure gauge-0.1~0.15 MPa, 0.01 MPa/unit
Stop valveΦ6
Polish SS tubeΦ6
Low vacuum system included

 

See our other tube furnaces:

 

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