Brother’s High Temperature Vacuum Lab CVD Furnace, 1200℃ 1400℃ 1600℃ CVD Tube Furnace Testing Machine, working temperature from 300℃ to 1600℃. With a vacuum pump, gas mixing, our CVD tube furnace adopts an advanced temperature control system, high temperature accuracy, excellent gas flow accuracy, easy operation, excellent heat-insulation effect, symmetrical temperature uniformity. Mainly used for labs of the university, research center, and production enterprise, etc.
Furnace Features:
- Max temperature:
1200℃ (HRE Fe-Cr-Al-Mo wire)
1400℃ (SiC Heater)
1600℃ (MoSi2 Heater) - 50 segments programmable and auto control
- Furnace structure: double layer steel dual cooling fan, the surface temperature below 50℃
- 304 stainless steel sealing flange
- Adjustable flange support structure at both ends to extend furnace tube life
- Over-temperature protection function, automatic power-off when the temperature exceeds the allowable set value
- Safety protection Automatically power off when the furnace body leaks
- Heating rate ≦20℃/min
- Temperature accuracy ±1 ℃
- Max vacuum -0.1MPa
- Configuration molecular pump, Vacuum 7×10^(-4)Pa
Multi-channel gas mixing tank & flowmeter
CVD Furnace Specification:
| MAX TEMPERATURE: | 1200℃ / 1400℃ / 1600℃ | NORMAL VACUUM: | -0.1MPa |
|---|---|---|---|
| MAX VACUUM: | Configuration Molecular Pump, Vacuum 7×10-4 Pa (Optional) | FLANGE: | 304 Stainless Steel Sealing Flange |
| OVER-TEMPERATURE PROTECTION: | Automatic Power-off When The Temperature Exceeds The Allowable Set Value | SAFETY PROTECTION: | Automatically Power Off When The Furnace Body Leaks |
| FURNACE STRUCTURE: | Double Layer Steel Dual Cooling Fan, Surface Temperature Below 50℃ | MAX HEATING RATE: | 20°C /min |
| TEMPERATURE ACCURACY: | ±1℃ | TEMPERATURE UNIFORMITY: | ±5℃ |
| TEMPERATURE CONTROL: | 50 Segments Programmable And Auto Control | APPLICATION: | CVD Testing |
Standard Spares:
- Plugging tube 4 pcs
- Furnace tube 1 pc
- Vacuum pump 1 pc
- Vacuum sealing flange 2 sets
- Vacuum gauge 1 pc
- Gas mixing tank
- Flowmeter
Optional Spares:
- High Vacuum system (Rotary vane vacuum pump, Diffusion pump, Molecular pump)
- Quick release flange, Three-way flange
- 7 inch HD touch screen
High Temperature Vacuum Lab CVD Tube Furnace Standard model:
Lab CVD Furnace up to 1200℃
| Model | Dia*Heating zone | Power | Max working temperature | Thermo couple |
Furnace tube material | Heating elements |
| BR-12NT-40/300 | 40x300mm | 3 KW | 1200℃ | K type | Quartz tube | Fe-Cr-Al-Mo wire |
| BR-12NT-60/300 | 60x300mm | 3 KW | ||||
| BR-12NT-80/300 | 80x300mm | 5 KW | ||||
| BR-12NT-100/300 | 100x300mm | 5 KW | ||||
| BR-12NT-120/300 | 120x300mm | 6 KW | ||||
| BR-12NT-40/450 | 40x450mm | 3 KW | ||||
| BR-12NT-60/450 | 60x450mm | 3 KW | ||||
| BR-12NT-80/450 | 80x450mm | 5 KW | ||||
| BR-12NT-100/450 | 100x450mm | 5 KW | ||||
| BR-12NT-120/450 | 120x450mm | 6 KW |
Lab CVD Furnace up to 1400℃
| Model | Dia*Heating zone | Power | Max working temperature | Thermo couple |
Furnace tube material | Heating elements |
| BR-14ST-40/300 | 40x300mm | 4 KW | 1400℃ | S type | Alumina tube | Sic Heater |
| BR-14ST-60/300 | 60x300mm | 4 KW | ||||
| BR-14ST-80/300 | 80x300mm | 4 KW | ||||
| BR-14ST-100/300 | 100x300mm | 6 KW | ||||
| BR-14ST-120/300 | 120x300mm | 6 KW | ||||
| BR-14ST-40/450 | 40x450mm | 4 KW | ||||
| BR-14ST-60/450 | 60x450mm | 4 KW | ||||
| BR-14ST-80/450 | 80x450mm | 4 KW | ||||
| BR-14ST-100/450 | 100x450mm | 6 KW | ||||
| BR-14ST-120/450 | 120x450mm | 6 KW |
Lab CVD Furnace up to 1600℃
| Model | Dia* Heating
zone |
Power | Max working temperature | Thermo couple |
Furnace tube material | Heating elements |
| BR-16MT-40/300 | 40x300mm | 4 KW | 1600℃ | B type | Alumina tube | MoSi2 Heater |
| BR-16MT-60/300 | 60x300mm | 4 KW | ||||
| BR-16MT-80/300 | 80x300mm | 4 KW | ||||
| BR-16MT-100/300 | 100x300mm | 6 KW | ||||
| BR-16MT-120/300 | 120x300mm | 6 KW | ||||
| BR-16MT-40/450 | 40x450mm | 5 KW | ||||
| BR-16MT-60/450 | 60x450mm | 5 KW | ||||
| BR-16MT-80/450 | 80x450mm | 5 KW | ||||
| BR-16MT-100/450 | 100x450mm | 7 KW | ||||
| BR-16MT-120/450 | 120x450mm | 7 KW |
See our other type of tube furnace:
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